EE290B/E298A

Spring 2005

Introduction to Electron Beam Lithography and Nano-fabrication Technology


   

Instructors:     Erik Anderson                 Alex Liddle  
                     EHanderson@lbl.gov        JAliddle@lbl.gov   
                     510-486-4446                  510-486-5260

Lecture:        Tuesday 2:00 - 3:30 pm, 65 Evans Hall
Laboratory:   Thursday 3:00 - 5:30 pm, LBNL Building 2 Rm 137, 510-486-4332


Announcements

 

Important Dates


Lectures

Lecture 1: Introduction  
Lecture 2: Patterning Technology 
Lecture 3: Electron Beam Systems I  
Lecture 4: Electron Optics   
Lecture 5: Electron Interactions in Solids  
Lecture 6: Electron Beam Systems II and Alignment  
Lecture 7: Nanofabrication Characterization  
Lecture 8: Proximity Effect Correction   
Lecture 9: Resist Materials I  
Lecture 10: Resist Materials II  
Lecture 11: Pattern Transfer (last year's lecture)  

 

Homework & Solutions

Homework 1 Solutions  
Homework 2 Solutions 
Homework 3 (due 4/14/05) 
Homework 4 (due 4/21/05) 

 

Student Presentations (Spring 2003)

Daewon Ha 
Garth Robins 
Greg McIntyre 
Jeremy Robinson 
Kyoungsub Shin 
Varadarajan Vidya 
Sriram Balasubramanian 
Yo-chih Tseng

 

Student Papers (Spring 2004)

Erik Douglas 
Gang Liu 
Ilan Gur 
Marie Eyoum 
Chenghan Yu  
Michael Huang 
Hiu Yung Wong 
Anne Sakdinawat